Nabu Optical Systems
CHRONOLOGY
Here, we document our efforts towards developing ANU-1, our beta version of our optical lithography system
Fabricating the lens system
Fabricating the lens system has been challenging and fun! From numerical modeling of diffractive optical elements, to figuring out scalable fabrication, has been quite a journey.
Building the wafer mount
Johnathan has been hard at work building the wafer mount. Our innovative holder is based on a self-developed, self-leveling automated platform using high-precision stepper motors and feedback control. The platform can go up and down by over 4 inches to simplify the loading/unloading process.
Gap measurement system
Precise vertical positioning between the lens system and the sample is critical for optical lithography. In our system, our focal depth requires a vertical positioning resolution of < 100 nm.
New camera software
Developing software for capturing images from ultrahigh resolution CMOS sensors.
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